Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12276916 | Drive device, optical system and lithography apparatus | Michel Aliman, Matthias Manger, Lars Berger | 2025-04-15 |
| 12276917 | Mirror, in particular for microlithography | Jan Horn, Kerstin Hild | 2025-04-15 |