Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12372877 | Projection exposure apparatus for semiconductor lithography | Markus Raab, Andreas Raba, Mirko Buechsenschuetz | 2025-07-29 |
| 12276916 | Drive device, optical system and lithography apparatus | Michel Aliman, Lars Berger, Mohammad Awad | 2025-04-15 |