Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12372877 | Projection exposure apparatus for semiconductor lithography | Andreas Raba, Mirko Buechsenschuetz, Matthias Manger | 2025-07-29 |
| 12313978 | Optical assembly, projection exposure apparatus and method | Andreas Raba, Johannes Lippert | 2025-05-27 |