Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12332576 | Method for maintaining a projection exposure apparatus, service module and arrangement for semiconductor lithography | Jens Kugler, Benjahman Julius Modeste, Marwene Nefzi | 2025-06-17 |
| 12306551 | Projection exposure apparatus having a device for determining the concentration of atomic hydrogen | Moritz Becker | 2025-05-20 |
| 12287588 | Method for operating an EUV lithography apparatus, and EUV lithography apparatus | Moritz Becker | 2025-04-29 |