Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12332576 | Method for maintaining a projection exposure apparatus, service module and arrangement for semiconductor lithography | Dirk Heinrich Ehm, Benjahman Julius Modeste, Marwene Nefzi | 2025-06-17 |
| 12287587 | Damping arrangement for vibration damping of an element in an optical system | Marwene Nefzi, Stefan Hembacher, David Schoenen | 2025-04-29 |