Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12306551 | Projection exposure apparatus having a device for determining the concentration of atomic hydrogen | Dirk Heinrich Ehm | 2025-05-20 |
| 12287588 | Method for operating an EUV lithography apparatus, and EUV lithography apparatus | Dirk Heinrich Ehm | 2025-04-29 |