Issued Patents 2025
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12431387 | Self-assembled monolayer for selective deposition | Kevin Kashefi | 2025-09-30 |
| 12412738 | System for target arcing mapping and plasma diagnosis | Junjie PAN, Fuhong Zhang | 2025-09-09 |
| 12394619 | Metal oxide preclean for bottom-up gapfill in MEOL and BEOL | Shiyu YUE, Jiajie Cen, Sahil Patel, Zhimin QI, Ju Hyun OH +10 more | 2025-08-19 |
| 12322573 | Pulsing plasma treatment for film densification | Rui Li, Xianmin Tang, Anthony Chih-Tung Chan | 2025-06-03 |
| 12252779 | Methods for in-situ chamber monitoring | Carmen Leal Cervantes | 2025-03-18 |
| 12243774 | Impurity removal in doped ALD tantalum nitride | Rui Li, Tae Hong Ha, Xianmin Tang, Lu Chen | 2025-03-04 |