Issued Patents 2025
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12431358 | Methods and materials for enhanced barrier performance and reduced via resistance | Seshadri Ganguli, Sang Ho Yu, Feng Chen | 2025-09-30 |
| 12243774 | Impurity removal in doped ALD tantalum nitride | Rui Li, Xiangjin Xie, Tae Hong Ha, Xianmin Tang | 2025-03-04 |
| 12211743 | Method of forming a metal liner for interconnect structures | Ge Qu, Zhiyuan Wu, Feng Chen, Carmen Leal Cervantes, Yong Jin Kim +4 more | 2025-01-28 |
| 12195845 | Conditioning treatment for ALD productivity | Christina L. Engler | 2025-01-14 |