Issued Patents 2025
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12406849 | Methods and apparatus for enhancing selectivity of titanium and titanium silicides during chemical vapor deposition | Takashi Kuratomi, I-Cheng Chen, Avgerinos V. Gelatos, Pingyan Lei, Mei Chang | 2025-09-02 |
| 12347695 | Methods for controlling contact resistance in cobalt-titanium structures | Takashi Kuratomi, Avgerinos V. Gelatos, Tae Hong Ha, Xuesong Lu, Szuheng Ho +3 more | 2025-07-01 |
| 12322573 | Pulsing plasma treatment for film densification | Rui Li, Xiangjin Xie, Anthony Chih-Tung Chan | 2025-06-03 |
| 12272551 | Selective metal removal with flowable polymer | Liqi Wu, Feng Q. Liu, Bhaskar Jyoti Bhuyan, James Hugh Connolly, Zhimin QI +7 more | 2025-04-08 |
| 12243774 | Impurity removal in doped ALD tantalum nitride | Rui Li, Xiangjin Xie, Tae Hong Ha, Lu Chen | 2025-03-04 |
| 12211743 | Method of forming a metal liner for interconnect structures | Ge Qu, Zhiyuan Wu, Feng Chen, Carmen Leal Cervantes, Yong Jin Kim +4 more | 2025-01-28 |