Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12142483 | Substrate processing apparatus and substrate processing method | Seiji Nakano, Munehisa KODAMA, Hirotoshi Mori, Hayato TANOUE, Yohei YAMAWAKI | 2024-11-12 |
| 12087588 | Substrate processing apparatus and substrate processing method | Hirotoshi Mori, Kazuya Hisano, Hayato TANOUE | 2024-09-10 |