Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12142483 | Substrate processing apparatus and substrate processing method | Yoshihiro Kawaguchi, Seiji Nakano, Hirotoshi Mori, Hayato TANOUE, Yohei YAMAWAKI | 2024-11-12 |
| 11929268 | Substrate processing system, substrate processing method and computer-readable recording medium | — | 2024-03-12 |
| 11858092 | Substrate processing system, substrate processing method and computer-readable recording medium | Takahiro Sakamoto | 2024-01-02 |