Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12142483 | Substrate processing apparatus and substrate processing method | Yoshihiro Kawaguchi, Munehisa KODAMA, Hirotoshi Mori, Hayato TANOUE, Yohei YAMAWAKI | 2024-11-12 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12142483 | Substrate processing apparatus and substrate processing method | Yoshihiro Kawaguchi, Munehisa KODAMA, Hirotoshi Mori, Hayato TANOUE, Yohei YAMAWAKI | 2024-11-12 |