Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12142483 | Substrate processing apparatus and substrate processing method | Yoshihiro Kawaguchi, Seiji Nakano, Munehisa KODAMA, Hirotoshi Mori, Hayato TANOUE | 2024-11-12 |
| 11969827 | Processing apparatus and processing method | Hayato TANOUE, Yohei Yamashita, Hirotoshi Mori | 2024-04-30 |