Issued Patents 2024
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12142483 | Substrate processing apparatus and substrate processing method | Yoshihiro Kawaguchi, Seiji Nakano, Munehisa KODAMA, Hayato TANOUE, Yohei YAMAWAKI | 2024-11-12 |
| 12087588 | Substrate processing apparatus and substrate processing method | Yoshihiro Kawaguchi, Kazuya Hisano, Hayato TANOUE | 2024-09-10 |
| 12076820 | Substrate processing apparatus and substrate processing method | Hayato TANOUE | 2024-09-03 |
| 12070820 | Processing apparatus and processing method | Hayato TANOUE, Yohei Yamashita | 2024-08-27 |
| 12020936 | Substrate processing apparatus and substrate processing method | Takeshi Tamura | 2024-06-25 |
| 11969827 | Processing apparatus and processing method | Hayato TANOUE, Yohei Yamashita, Yohei YAMAWAKI | 2024-04-30 |