Issued Patents 2024
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12142483 | Substrate processing apparatus and substrate processing method | Yoshihiro Kawaguchi, Seiji Nakano, Munehisa KODAMA, Hirotoshi Mori, Yohei YAMAWAKI | 2024-11-12 |
| 12087588 | Substrate processing apparatus and substrate processing method | Hirotoshi Mori, Yoshihiro Kawaguchi, Kazuya Hisano | 2024-09-10 |
| 12076820 | Substrate processing apparatus and substrate processing method | Hirotoshi Mori | 2024-09-03 |
| 12070820 | Processing apparatus and processing method | Yohei Yamashita, Hirotoshi Mori | 2024-08-27 |
| 11969827 | Processing apparatus and processing method | Yohei Yamashita, Yohei YAMAWAKI, Hirotoshi Mori | 2024-04-30 |