Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12174545 | System and method for performing extreme ultraviolet photolithography processes | Tai-Yu Chen, Sagar Deepak Khivsara, Kuo-An Liu, Chieh Hsieh, Shang-Chieh Chien +5 more | 2024-12-24 |
| 12096544 | Lithography thermal control | Tai-Yu Chen, Cho-Ying Lin, Sagar Deepak Khivsara, Hsiang-Lin Chen, Chieh Hsieh +5 more | 2024-09-17 |
| 12087714 | Reduction of cracks in passivation layer | Kuo-An Liu, Wen-Chiung Tu, Yuan-Yang Hsiao, Chen-Chiu Huang, Zhiqiang Wu +1 more | 2024-09-10 |