Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11935770 | Modular mainframe layout for supporting multiple semiconductor process modules or chambers | Coby Scott GROVE, Paul Z. Wirth, Avinash SHANTARAM, Alpay Yilmaz, Amir NISSAN +1 more | 2024-03-19 |
| 11935771 | Modular mainframe layout for supporting multiple semiconductor process modules or chambers | Coby Scott GROVE, Paul Z. Wirth, Avinash SHANTARAM, Alpay Yilmaz, Amir NISSAN +3 more | 2024-03-19 |
| 11899366 | Method and apparatus for post exposure processing of photoresist wafers | Viachslav Babayan, Douglas A. Buchberger, Jr., Qiwei Liang, Ludovic Godet, Srinivas D. Nemani +2 more | 2024-02-13 |