Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12130606 | Disturbance compensation for substrate processing recipes | Atilla Kilicarslan, Raechel Chu-Hui Tan, Brooke Elise Montgomery | 2024-10-29 |
| 11984333 | Methods and systems for temperature control for a substrate | Kiyki-Shiy Shang, Mikhail Taraboukhine | 2024-05-14 |
| 11935770 | Modular mainframe layout for supporting multiple semiconductor process modules or chambers | Randy Harris, Coby Scott GROVE, Avinash SHANTARAM, Alpay Yilmaz, Amir NISSAN +1 more | 2024-03-19 |
| 11935771 | Modular mainframe layout for supporting multiple semiconductor process modules or chambers | Randy Harris, Coby Scott GROVE, Avinash SHANTARAM, Alpay Yilmaz, Amir NISSAN +3 more | 2024-03-19 |