Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11984333 | Methods and systems for temperature control for a substrate | Paul Z. Wirth, Mikhail Taraboukhine | 2024-05-14 |
| 11862499 | Multiplexing control of multiple positional sensors in device manufacturing machines | Mikhail Taraboukhine, Venkata Raghavaiah Chowdhary Kode | 2024-01-02 |