Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12068150 | Substrate cleaning solution, and using the same, method for manufacturing cleaned substrate and method for manufacturing device | Tatsuro Nagahara, Yuko HORIBA | 2024-08-20 |
| 11901173 | Substrate processing method | Yukifumi YOSHIDA, Manabu OKUTANI, Shuichi Yasuda, Yasunori Kanematsu, Dai Ueda +2 more | 2024-02-13 |