Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11919051 | Substrate cleaning apparatus and substrate cleaning method | Ayumi HIGUCHI, Naoko Yamaguchi | 2024-03-05 |
| 11921426 | Substrate processing method, substrate processing apparatus, and recipe selection method | Katsuya Akiyama, Song Zhang | 2024-03-05 |
| 11901173 | Substrate processing method | Manabu OKUTANI, Shuichi Yasuda, Yasunori Kanematsu, Dai Ueda, Song Zhang +2 more | 2024-02-13 |
| 11872605 | Substrate processing method and substrate processing apparatus | Katsuya Akiyama | 2024-01-16 |