Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11921426 | Substrate processing method, substrate processing apparatus, and recipe selection method | Yukifumi YOSHIDA, Song Zhang | 2024-03-05 |
| 11872605 | Substrate processing method and substrate processing apparatus | Yukifumi YOSHIDA | 2024-01-16 |