Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12042813 | Substrate processing method and substrate processing apparatus | Hiroshi Abe, Takashi Ota, Takaaki ISHIZU, Kenji Kobayashi, Ryo MURAMOTO +2 more | 2024-07-23 |
| 12046465 | Substrate treatment method and substrate treatment apparatus | — | 2024-07-23 |
| 11901173 | Substrate processing method | Yukifumi YOSHIDA, Shuichi Yasuda, Yasunori Kanematsu, Dai Ueda, Song Zhang +2 more | 2024-02-13 |