Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12042813 | Substrate processing method and substrate processing apparatus | Hiroshi Abe, Takashi Ota, Takaaki ISHIZU, Kenji Kobayashi, Sei NEGORO +2 more | 2024-07-23 |
| 11961757 | Substrate holding apparatus and substrate processing apparatus | — | 2024-04-16 |