Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12064739 | Chemical liquid preparation device, and substrate processing device | Hajime NISHIDE, Takashi Izuta, Takatoshi Hayashi, Katsuhiro Fukui, Koichi Okamoto +4 more | 2024-08-20 |
| 12042813 | Substrate processing method and substrate processing apparatus | Hiroshi Abe, Takashi Ota, Takaaki ISHIZU, Kenji Kobayashi, Ryo MURAMOTO +2 more | 2024-07-23 |