Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12064739 | Chemical liquid preparation device, and substrate processing device | Takashi Izuta, Takatoshi Hayashi, Katsuhiro Fukui, Koichi Okamoto, Kazuhiro Fujita +4 more | 2024-08-20 |
| 11915945 | Substrate processing apparatus | Kwichang KANG, Takao Matsumoto | 2024-02-27 |