Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11908938 | Substrate processing liquid for etching a metal layer, substrate processing method and substrate processing apparatus | Yosuke HANAWA | 2024-02-20 |
| 11897009 | Substrate processing method and substrate processing device | Yuta SASAKI, Yosuke HANAWA, Hiroaki Kitagawa | 2024-02-13 |
| 11901173 | Substrate processing method | Yukifumi YOSHIDA, Manabu OKUTANI, Shuichi Yasuda, Yasunori Kanematsu, Song Zhang +2 more | 2024-02-13 |