Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11908938 | Substrate processing liquid for etching a metal layer, substrate processing method and substrate processing apparatus | Dai Ueda | 2024-02-20 |
| 11897009 | Substrate processing method and substrate processing device | Dai Ueda, Yuta SASAKI, Hiroaki Kitagawa | 2024-02-13 |