Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11901173 | Substrate processing method | Yukifumi YOSHIDA, Manabu OKUTANI, Yasunori Kanematsu, Dai Ueda, Song Zhang +2 more | 2024-02-13 |
| 11881417 | Substrate processing apparatus and substrate processing method | Kenji Kobayashi | 2024-01-23 |