Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12068150 | Substrate cleaning solution, and using the same, method for manufacturing cleaned substrate and method for manufacturing device | Takafumi KINUTA, Tatsuro Nagahara | 2024-08-20 |
| 11859152 | Substrate pattern filling composition and use of the same | Hiroko Kuboki, Tatsuro Nagahara | 2024-01-02 |