Issued Patents 2024
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12165866 | Wafer cleaning apparatus and wafer cleaning method using the same | Sung Hyun Park, Seo Hyun Kim, Seung Ho Kim, Young-chan Kim, Young-Hoo Kim +4 more | 2024-12-10 |
| 12042828 | Wafer cleaning apparatus and wafer cleaning method using the same | Seung Min Shin, Hun Jae Jang, Seok Hoon Kim, Young-Hoo Kim, In-Gi Kim +3 more | 2024-07-23 |
| 11986921 | Chemical mechanical polishing apparatus, chemical mechanical polishing method and method for fabricating semiconductor device | Myung-Ki Hong, Yong Hee Lee, Byoung-ho Kwon | 2024-05-21 |
| 11923216 | Apparatus and method for treating substrate including process chambers and transfer chamber | Seung Min Shin, Sang Jin Park, Hae-Won Choi, Jang Jin LEE, Ji Hwan Park +4 more | 2024-03-05 |
| 11887868 | Substrate processing apparatus and apparatus for manufacturing integrated circuit device | Young-Hoo Kim, Sang-Jine Park, Yong-Jhin Cho, Yeon-Jin Gil, Ji Hoon Jeong +2 more | 2024-01-30 |
| 11862457 | Wafer cleaning apparatus, method for cleaning wafer and method for fabricating semiconductor device | Seongkeun Cho, Young-Hoo Kim, Seung Min Shin, Tae Min Earmme, Hun Jae Jang +1 more | 2024-01-02 |