Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12165866 | Wafer cleaning apparatus and wafer cleaning method using the same | Sung Hyun Park, Seo Hyun Kim, Seung Ho Kim, Young-chan Kim, Tae Hong Kim +4 more | 2024-12-10 |
| 12042828 | Wafer cleaning apparatus and wafer cleaning method using the same | Seung Min Shin, Hun Jae Jang, Seok Hoon Kim, In-Gi Kim, Tae Hong Kim +3 more | 2024-07-23 |
| 11887868 | Substrate processing apparatus and apparatus for manufacturing integrated circuit device | Sang-Jine Park, Yong-Jhin Cho, Yeon-Jin Gil, Ji Hoon Jeong, Byung-Kwon Cho +2 more | 2024-01-30 |
| 11862457 | Wafer cleaning apparatus, method for cleaning wafer and method for fabricating semiconductor device | Seongkeun Cho, Seung Min Shin, Tae Min Earmme, Kun-Tack Lee, Hun Jae Jang +1 more | 2024-01-02 |