Issued Patents 2024
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12165866 | Wafer cleaning apparatus and wafer cleaning method using the same | Sung Hyun Park, Seo Hyun Kim, Seung Ho Kim, Young-chan Kim, Young-Hoo Kim +4 more | 2024-12-10 |
| 12100602 | Wet etching apparatus | Jin Woo Lee, Yong-Jun Choi, Seok Hoon Kim, Ji-Hoon Cha | 2024-09-24 |
| 12042828 | Wafer cleaning apparatus and wafer cleaning method using the same | Hun Jae Jang, Seok Hoon Kim, Young-Hoo Kim, In-Gi Kim, Tae Hong Kim +3 more | 2024-07-23 |
| 11923216 | Apparatus and method for treating substrate including process chambers and transfer chamber | Sang Jin Park, Hae-Won Choi, Jang Jin LEE, Ji Hwan Park, Kun-Tack Lee +4 more | 2024-03-05 |
| 11862457 | Wafer cleaning apparatus, method for cleaning wafer and method for fabricating semiconductor device | Seongkeun Cho, Young-Hoo Kim, Tae Min Earmme, Kun-Tack Lee, Hun Jae Jang +1 more | 2024-01-02 |