Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11977332 | Substrate treating apparatus and substrate treating method | YeRim Yeon, Anton Koriakin, Kihoon Choi, Youngran Ko, Jeong-Ho Cho +2 more | 2024-05-07 |
| 11940734 | Apparatus and method for treating substrate | Ki Hoon CHOI, Eung Su Kim, Pil Kyun HEO, Jin Yeong SUNG, Anton Koriakin +1 more | 2024-03-26 |
| 11923216 | Apparatus and method for treating substrate including process chambers and transfer chamber | Seung Min Shin, Sang Jin Park, Jang Jin LEE, Ji Hwan Park, Kun-Tack Lee +4 more | 2024-03-05 |
| 11887866 | Supercritical processing apparatus | Jae Seong LEE, Ki Hoon CHOI, Anton Koriakin, Chan Young Heo, Do Heon Kim +1 more | 2024-01-30 |