Issued Patents 2024
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12148674 | Substrate processing control using a measured size distribution of by-product particles | Jung Suk GOH, Young Dae CHUNG | 2024-11-19 |
| 12094733 | Substrate treatment apparatus | Young Dae CHUNG, Won Geun KIM, Jee Young Lee, Tae Shin KIM, Se-hoon Oh +2 more | 2024-09-17 |
| 12055857 | Mask processing apparatus and substrate processing apparatus | Tae Hee Kim, Tae Shin KIM, Young Dae CHUNG, Young Eun JEON | 2024-08-06 |
| 11923213 | Substrate heating unit, substrate processing apparatus, and substrate processing method | Tae Shin KIM, Young Dae CHUNG, Jee Young Lee, Won Geun KIM | 2024-03-05 |
| 11914773 | Brain-machine interface based intention determination device and method using virtual environment | Seong-Whan LEE, Byoung-Hee Kwon, Kyung-Hwan Shim, Byeong Hoo LEE | 2024-02-27 |
| 11887868 | Substrate processing apparatus and apparatus for manufacturing integrated circuit device | Young-Hoo Kim, Sang-Jine Park, Yong-Jhin Cho, Yeon-Jin Gil, Byung-Kwon Cho +2 more | 2024-01-30 |