Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12094733 | Substrate treatment apparatus | Young Dae CHUNG, Won Geun KIM, Ji Hoon Jeong, Tae Shin KIM, Se-hoon Oh +2 more | 2024-09-17 |
| 11923213 | Substrate heating unit, substrate processing apparatus, and substrate processing method | Tae Shin KIM, Young Dae CHUNG, Ji Hoon Jeong, Won Geun KIM | 2024-03-05 |