Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12148674 | Substrate processing control using a measured size distribution of by-product particles | Jung Suk GOH, Ji Hoon Jeong | 2024-11-19 |
| 12094733 | Substrate treatment apparatus | Won Geun KIM, Jee Young Lee, Ji Hoon Jeong, Tae Shin KIM, Se-hoon Oh +2 more | 2024-09-17 |
| 12055857 | Mask processing apparatus and substrate processing apparatus | Tae Hee Kim, Ji Hoon Jeong, Tae Shin KIM, Young Eun JEON | 2024-08-06 |
| 11923213 | Substrate heating unit, substrate processing apparatus, and substrate processing method | Tae Shin KIM, Ji Hoon Jeong, Jee Young Lee, Won Geun KIM | 2024-03-05 |