Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11986921 | Chemical mechanical polishing apparatus, chemical mechanical polishing method and method for fabricating semiconductor device | Yong Hee Lee, Byoung-ho Kwon, Kun-Tack Lee | 2024-05-21 |