Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12099293 | Phase shift mask for extreme ultraviolet lithography and a method of manufacturing a semiconductor device using the same | Hwanseok Seo, Seongsue Kim | 2024-09-24 |
| 12072637 | Lithography method using multi-scale simulation, semiconductor device manufacturing method and exposure equipment | Byunghoon Lee, Byunggook Kim, Maenghyo Cho, Muyoung Kim, Junghwan Moon +3 more | 2024-08-27 |
| 12032281 | Pellicle cleaning apparatus and pellicle cleaning method using the same | Byunghoon Lee, Jin Goo Park, Tae Gon Kim, Sanguk Park, Jinho AHN +1 more | 2024-07-09 |