Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12032281 | Pellicle cleaning apparatus and pellicle cleaning method using the same | Byunghoon Lee, Jin Goo Park, Tae Gon Kim, Sanguk Park, Changyoung Jeong +1 more | 2024-07-09 |
| 11940726 | Mask protective module, pellicle having the same, and lithography apparatus having the same | Jung-Hwan Kim, Seongchul Hong | 2024-03-26 |