Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12032281 | Pellicle cleaning apparatus and pellicle cleaning method using the same | Byunghoon Lee, Tae Gon Kim, Sanguk Park, Changyoung Jeong, Jinho AHN +1 more | 2024-07-09 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12032281 | Pellicle cleaning apparatus and pellicle cleaning method using the same | Byunghoon Lee, Tae Gon Kim, Sanguk Park, Changyoung Jeong, Jinho AHN +1 more | 2024-07-09 |