Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12072637 | Lithography method using multi-scale simulation, semiconductor device manufacturing method and exposure equipment | Changyoung Jeong, Byunggook Kim, Maenghyo Cho, Muyoung Kim, Junghwan Moon +3 more | 2024-08-27 |
| 12032281 | Pellicle cleaning apparatus and pellicle cleaning method using the same | Jin Goo Park, Tae Gon Kim, Sanguk Park, Changyoung Jeong, Jinho AHN +1 more | 2024-07-09 |
| 11893196 | Electronic device comprising bonding layer in contact with active area of digitizer | Jeonggyu JO, Jungchul AN | 2024-02-06 |