Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12072637 | Lithography method using multi-scale simulation, semiconductor device manufacturing method and exposure equipment | Byunghoon Lee, Changyoung Jeong, Byunggook Kim, Maenghyo Cho, Junghwan Moon +3 more | 2024-08-27 |