Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12185450 | Semiconductor manufacturing apparatus and operating method thereof | Dohyung Kim, Insung Kim, Jinhong Park, Jungchul Lee | 2024-12-31 |
| 11979973 | Semiconductor manufacturing apparatus and operating method thereof | Dohyung Kim, Insung Kim, Jinhong Park, Jungchul Lee | 2024-05-07 |
| 11940726 | Mask protective module, pellicle having the same, and lithography apparatus having the same | Jinho AHN, Jung-Hwan Kim | 2024-03-26 |