Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12099293 | Phase shift mask for extreme ultraviolet lithography and a method of manufacturing a semiconductor device using the same | Hwanseok Seo, Changyoung Jeong | 2024-09-24 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12099293 | Phase shift mask for extreme ultraviolet lithography and a method of manufacturing a semiconductor device using the same | Hwanseok Seo, Changyoung Jeong | 2024-09-24 |