Issued Patents 2024
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12154765 | Plasma processing apparatus and plasma processing method | Nanako Tamari, Kosa Hirota, Masahiro Nagatani | 2024-11-26 |
| 12148633 | Plasma processing apparatus and method for releasing sample | Masaki Ishiguro | 2024-11-19 |
| 12112925 | Plasma processing apparatus | Masaki Ishiguro, Shigeru Shirayone, Kazuyuki Ikenaga, Tomoyuki Tamura | 2024-10-08 |
| 12080529 | Plasma processing apparatus and prediction method of the condition of plasma processing apparatus | Yoshito Kamaji | 2024-09-03 |
| 12050455 | State prediction apparatus and semiconductor manufacturing apparatus | Masaki Ishiguro | 2024-07-30 |
| 12040167 | Diagnosis apparatus, plasma processing apparatus and diagnosis method | Shota Umeda, Kenji Tamaki, Masaki Ishiguro | 2024-07-16 |