Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12080529 | Plasma processing apparatus and prediction method of the condition of plasma processing apparatus | Masahiro Sumiya | 2024-09-03 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12080529 | Plasma processing apparatus and prediction method of the condition of plasma processing apparatus | Masahiro Sumiya | 2024-09-03 |