Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12112925 | Plasma processing apparatus | Masaki Ishiguro, Masahiro Sumiya, Shigeru Shirayone, Kazuyuki Ikenaga | 2024-10-08 |
| 11987880 | Manufacturing method and inspection method of interior member of plasma processing apparatus | Kazuhiro Ueda, Masaru Kurihara, Kazuyuki Ikenaga | 2024-05-21 |