Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11987880 | Manufacturing method and inspection method of interior member of plasma processing apparatus | Kazuhiro Ueda, Kazuyuki Ikenaga, Tomoyuki Tamura | 2024-05-21 |
| 11907235 | Plasma processing apparatus including predictive control | Yutaka Okuyama, Takeshi Ohmori, Hyakka Nakada | 2024-02-20 |