Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12148633 | Plasma processing apparatus and method for releasing sample | Masahiro Sumiya | 2024-11-19 |
| 12112925 | Plasma processing apparatus | Masahiro Sumiya, Shigeru Shirayone, Kazuyuki Ikenaga, Tomoyuki Tamura | 2024-10-08 |
| 12050455 | State prediction apparatus and semiconductor manufacturing apparatus | Masahiro Sumiya | 2024-07-30 |
| 12040167 | Diagnosis apparatus, plasma processing apparatus and diagnosis method | Shota Umeda, Kenji Tamaki, Masahiro Sumiya | 2024-07-16 |